Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure Wafer handling stages from Prior ...

Bowed wafers enter the system at two cassette tilt stations. Wafer handling is via a robot fitted with an edge grip end effector. Wafers are oriented on a notch finder, with wafer ID captured by a ...

It supports various substrate types for 6", 8” and 12" wafers. Its versatile handling system supports wafer thicknesses ...

merge the functionalities of a 300 mm metrology station with a wafer handling system integrated within an Equipment Front End ...