A Wafer-Scale LLM Inference System” was published by researchers at University of Edinburgh and Microsoft Research. Abstract ...

Bowed wafers enter the system at two cassette tilt stations ... Wafers are then inspected at a custom wafer pocket mounted on an open-frame X-Y stage assembly. The wafer on the table is inspected on ...

including hard disc drive platens and semiconductor wafers. Shooting a laser beam on the surface under analysis will allow the system to maintain optimum focus on the specimen at high magnifications, ...

despite featuring an integrated vacuum chuck to accommodate wafers or other samples. Engineered as a parallel-kinematic multi-axis system, this stage delivers exceptional precision in a remarkably ...