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MEMS的这个新应用,要火了
MUT的全称为Microelectromechanical Ultrasonic Transducer,即微机电超声换能器。它是一种利用MEMS技术制造的超声换能器,可实现电能和声能之间的转换,具有体积小、重量轻、功耗低、易于集成等优点。其中PMUT指的是压电(Piezoelectric)技术的换能器,而CMUT指的是电容(Capacitor)实现的换能器。
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