Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure Wafer handling stages from Prior ...
Bowed wafers enter the system at two cassette tilt stations. Wafer handling is via a robot fitted with an edge grip end effector. Wafers are oriented on a notch finder, with wafer ID captured by a ...
The SERENO platform offers maximum flexibility regarding wafer-handling capabilities and process control. It supports various ...
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